PLANARIZED PATTERNING OF Y-BA-CU-O THIN-FILMS FOR MULTILAYER TECHNOLOGY

被引：2
|
作者：
NILSSON, PA
BRORSSON, G
ORLIAGUET, JM
OLSSON, E
OLIN, H
GUSTAFSSON, M
CLAESON, T
机构：
[1] Department of Physics, Chalmers University of Technology
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1995年 / 5卷 / 02期
关键词：
D O I：
10.1109/77.402893
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Planarized layers of YBa2Cu3O7 (YBCO) were made by etching trenches in SrTiO3 (STO) substrates laser depositing a YBCO film mechanically polishing film down to the substrate surface. These structures exhibited critical temperatures (T-c) of 88 K and a critical current density (J(c)) of 10(6) A/cm(2) at 77 K. The planarized surface was smooth, with a maximum height difference between the YBCO STO of 20 nm. The surfaces were used as templates for epitaxial growth of multilayer insulators of STO and PrBa2Cu3O7 (PBCO) and top YBCO layers. Complete crossovers, free of superconducting shorts, with T-c of 86 K and critical current density (J(c)) of 2x10(5) A/cm(2) were made.
引用
收藏
页码：1653 / 1656
页数：4
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