ETCHING OF GERMANIUM WITH WATER VAPOR

被引：6

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作者：

INOUE, M

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来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1972年 / 11卷 / 08期

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D O I：

10.1143/JJAP.11.1147

中图分类号：

O59 [应用物理学];

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页码：1147 / &

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