RBS, INFRARED AND DIFFRACTION COMPARED ANALYSIS OF SIC SYNTHESIS IN C-IMPLANTED SILICON

被引：9

作者：

DURUPT, P ^{[1
]}

CANUT, B ^{[1
]}

GAUTHIER, JP ^{[1
]}

ROGER, JA ^{[1
]}

PIVOT, J ^{[1
]}

机构：

[1] UNIV CLAUDE BERNARD LYON 1,CNRS,CRISTALLOG LAB,F-69622 VILLEURBANNE,FRANCE

来源：

MATERIALS RESEARCH BULLETIN | 1980年 / 15卷 / 11期

关键词：

D O I：

10.1016/0025-5408(80)90235-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1557 / 1565

页数：9

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