RBS, INFRARED AND DIFFRACTION COMPARED ANALYSIS OF SIC SYNTHESIS IN C-IMPLANTED SILICON

被引：9
作者：
DURUPT, P [1 ]
CANUT, B [1 ]
GAUTHIER, JP [1 ]
ROGER, JA [1 ]
PIVOT, J [1 ]
机构：
[1] UNIV CLAUDE BERNARD LYON 1,CNRS,CRISTALLOG LAB,F-69622 VILLEURBANNE,FRANCE
来源：
MATERIALS RESEARCH BULLETIN | 1980年 / 15卷 / 11期
关键词：
D O I：
10.1016/0025-5408(80)90235-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1557 / 1565
页数：9
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