THERMODYNAMICS AND GROWTH KINETICAL CONSIDERATION OF METAL-NITRIDE FORMATION BY NITROGEN IMPLANTATION

被引：30
作者：
LIU, BX [1 ]
ZHOU, X [1 ]
LI, HD [1 ]
机构：
[1] TSINGHUA UNIV,DEPT MAT SCI & ENGN,BEIJING 100084,PEOPLES R CHINA
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 113卷 / 01期
关键词：
D O I：
10.1002/pssa.2211130102
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：11 / 22
页数：12
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