CVD REACTORS FOR THE COATING OF FIBROUS SUBSTRATES MODELING AND NUMERICAL-SIMULATION

A typical reactor configuration for the manufacture of inorganic fibers by chemical vapor deposition (CVD) technology is analyzed. A mathematical model for the momentum, mass, and energy transfer phenomena is presented. The resulting governing equations are solved by the Galerkin finite element method. To reduce requirements for computational resources, a simplified kinetic model is adopted. Two- and three-dimensional steady-state results, reported in the range of actual experimental conditions, serve to illustrate the complex interaction between the flow field and the different transport mechanisms. A comprehensive analysis of these results sheds some light on the effects of buoyancy-induced flows on interfacial transport processes. It is also shown how the reactor arrangement can play a decisive role on its performance and the quality of the coated fibers. © 1990, The Electrochemical Society, Inc. All rights reserved.