CORRELATION OF THE CONCENTRATION OF THE CARBON-ASSOCIATED RADIATION-DAMAGE LEVELS WITH THE TOTAL CARBON CONCENTRATION IN SILICON

被引:62
作者
FERENCZI, G [1 ]
LONDOS, CA [1 ]
PAVELKA, T [1 ]
SOMOGYI, M [1 ]
MERTENS, A [1 ]
机构
[1] HUMBOLDT UNIV,SEKT PHYS,BEREICH 06,DDR-1086 BERLIN,GER DEM REP
关键词
D O I
10.1063/1.340487
中图分类号
O59 [应用物理学];
学科分类号
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页码:183 / 189
页数:7
相关论文
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