A THEORETICAL-STUDY OF THE CRITICAL RADIUS OF PRECIPITATES AND ITS APPLICATION TO SILICON-OXIDE IN SILICON

被引：141
作者：
VANHELLEMONT, J
CLAEYS, C
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 09期
关键词：
D O I：
10.1063/1.339194
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3960 / 3967
页数：8
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