LOW-PRESSURE DEPOSITION OF POLYCRYSTALLINE SILICON FROM SILANE

被引：110

作者：

VANDENBREKEL, CHJ

BOLLEN, LJM

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1981年 / 54卷 / 02期

关键词：

D O I：

10.1016/0022-0248(81)90475-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：310 / 322

页数：13

共 16 条

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