EFFECT OF NOBLE-GASES ON THE PROPERTIES OF ION-BEAM SPUTTERED NIOBIUM FILMS

被引：3
|
作者：
LICHTENWALNER, DJ [1 ]
ANDERSON, AC [1 ]
RUDMAN, DA [1 ]
机构：
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 01期
关键词：
D O I：
10.1116/1.575753
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：102 / 104
页数：3
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