AN EFFECT OF VIBRATIONAL-RELAXATION ON THE QUANTUM YIELD OF THE EXCIMER KRF LASER ACTION

被引：0

作者：

DATSYUK, VV ^{[1
]}

IZMAILOV, IA ^{[1
]}

KOCHELAP, VA ^{[1
]}

机构：

[1] ACAD SCI UKSSR,INST SEMICOND,KIEV,UKRAINE,USSR

来源：

KVANTOVAYA ELEKTRONIKA | 1988年 / 15卷 / 01期

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D O I：

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：106 / 108

页数：3

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共 11 条

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