ELLIPS - FORTRAN SIMULATION OF A POLARIZATION-MODULATION ELLIPSOMETER

被引：8

作者：

BERMUDEZ, VM ^{[1
]}

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

来源：

COMPUTER PHYSICS COMMUNICATIONS | 1977年 / 13卷 / 03期

关键词：

D O I：

10.1016/0010-4655(77)90015-7

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

引用

页码：207 / 224

页数：18

共 19 条

[1] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) :1077-&

[2] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) :639-646

[3] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) :812-819

[4] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[5] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) :1380-&

[6] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) :1118-&

[7] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) :773-&

[8] EFFECTS OF COMPONENT IMPERFECTIONS ON ELLIPSOMETER CALIBRATION [J].

HUNTER, WR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (08) :951-957

[9] AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE [J].

JASPERSON, SN ;

SCHNATTERLY, SE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (06) :761-+

[10] MODULATED ELLIPSOMETER FOR STUDYING THIN-FILM OPTICAL PROPERTIES AND SURFACE DYNAMICS [J].

JASPERSON, SN ;

BURGE, DK ;

OHANDLEY, RC .

SURFACE SCIENCE, 1973, 37 (01) :548-558

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