THE GROWTH AND CHARACTERIZATION OF UNIFORM GA1-XINXAS (X LESS-THAN-OR-EQUAL-TO .25) BY ORGANO-METALLIC VPE

被引：54
作者：
LUDOWISE, MJ
COOPER, CB
SAXENA, RR
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1981年 / 10卷 / 06期
关键词：
D O I：
10.1007/BF02661191
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1051 / 1068
页数：18
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