A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING

被引：38
作者：
CARTER, G
NOBES, MJ
WEBB, RP
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 08期
关键词：
D O I：
10.1007/BF00542369
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：2091 / 2102
页数：12
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