TRANSPORT OF VACUUM-ARC PLASMAS THROUGH MAGNETIC MACROPARTICLE FILTERS

被引：144
作者：
ANDERS, A
ANDERS, S
BROWN, IG
机构：
[1] Lawrence Berkeley Laboratory, University of California, Berkeley
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 1995年 / 4卷 / 01期
关键词：
D O I：
10.1088/0963-0252/4/1/001
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Vacuum arc plasma deposition combined with magnetic filtering of the plasma to remove macroparticles is a promising technique for the production of metallic, compound and hard amorphous carbon thin films. High efficiency of the magnetic filter is a crucial parameter for the application of this technique. We report investigations of the influence of different filter designs, magnetic field configurations and electric potentials on the filter efficiency. We analyse the transport mechanisms on which the flow of plasma through the filter is based, and describe and discuss the occurrence of instabilities in magnetic filters. With an optimum filter arrangement we were able to obtain a filter output of 25% of the total number of ions produced by the vacuum arc discharge.
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页码：1 / 12
页数：12
相关论文
共 63 条
[1]   REDUCTION IN MACROPARTICLES DURING THE DEPOSITION OF TIN FILMS PREPARED BY ARC ION PLATING [J].
AKARI, K ;
TAMAGAKI, H ;
KUMAKIRI, T ;
TSUJI, K .
SURFACE & COATINGS TECHNOLOGY, 1990, 43-4 (1-3) :312-323
[2]  
Aksenov I. I., 1980, Soviet Physics - Technical Physics, V25, P1164
[3]  
Aksenov I.I., 1980, SOV J PLASMA PHYS, V6, P504
[4]  
AKSENOV II, 1978, INSTRUM EXP TECH+, V21, P1416
[5]   PLASMA FLUX MOTION IN A TOROIDAL PLASMA GUIDE [J].
AKSENOV, II ;
BELOKHVOSTIKOV, AN ;
PADALKA, VG ;
REPALOV, NS ;
KHOROSHIKH, VM .
PLASMA PHYSICS AND CONTROLLED FUSION, 1986, 28 (05) :761-770
[6]   PROPERTIES OF DIAMOND-LIKE COATINGS PREPARED BY VACUUM-ARC DEPOSITION [J].
AKSENOV, II ;
STRELNITSKIJ, VE .
SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :98-105
[7]  
AKSENOV II, 1978, SOV J PLASMA PHYS, V4, P425
[8]  
ALEXANDROV AF, 1984, PRINCIPLES PLASMA EL, P208
[9]   EFFECT OF DUCT BIAS ON TRANSPORT OF VACUUM-ARC PLASMAS THROUGH CURVED MAGNETIC FILTERS [J].
ANDERS, A ;
ANDERS, S ;
BROWN, IG .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :4900-4905
[10]  
ANDERS A, 1994, J APPL PHYS, V75, P4895
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