ABSOLUTE FLATNESS TESTING BY AN EXTENDED ROTATION METHOD USING 2 ANGLES OF ROTATION

被引：0

作者：

SCHULZ, G ^{[1
]}

机构：

[1] CENT INST OPT & SPECTROSCOPY, BERLIN, GERMANY

来源：

APPLIED OPTICS | 1993年 / 32卷 / 07期

关键词：

ABSOLUTE FLATNESS TESTING;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The rotation method for the absolute testing of three flats is extended by adding a second rotation of one of the flats. This means that altogether five interferograms of pairs of flats (positional combinations) are evaluated: three basic combinations and two rotational combinations. The effect of random measuring errors is minimized by fully applying least-squares methods. Here the addition of a second rotation leads to a substantial increase of accuracy of the results and enables the lateral resolution to be further enhanced.

引用

页码：1055 / 1059

页数：5

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[No title captured]

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