ION-BEAM-ASSISTED DEPOSITION AS A METHOD FOR PRODUCTION OF EFFECTIVE OPTICAL COATINGS

被引：4
作者：
RADJABOV, TD
DJAMALETDINOVA, IE
SHARUDO, AV
HAMIDOVA, H
机构：
[1] NPO Academpribor, Tashkent
来源：
SURFACE & COATINGS TECHNOLOGY | 1995年 / 72卷 / 1-2期
关键词：
COATINGS; DEPOSITION; ION BEAM;
D O I：
10.1016/0257-8972(94)02335-2
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The optical parameters of thin (d approximate to 100 nm) film coatings of ZnS, LiF and MgF2 produced by ion-beam-assisted deposition have been investigated using spectrophotometry and ellipsometry techniques. It is observed that coatings produced by ion-beam-assisted deposition are less porous and more stable to moisture influence, meanwhile their adhesion strengths are 15%-20% higher than those for coatings produced without ion bombardment.
引用
收藏
页码：99 / 102
页数：4
相关论文
共 9 条
[1]   STRESS AND ADHESION OF CHROMIUM AND BORON FILMS DEPOSITED UNDER ION-BOMBARDMENT [J].
BARTH, M ;
ENSINGER, W ;
HOFFMANN, V ;
WOLF, GK .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :254-258
[2]   NON-BULK-LIKE PHYSICAL-PROPERTIES OF THIN-FILMS DUE TO ION-BOMBARDMENT DURING FILM GROWTH [J].
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :462-463
[3]   ION-ASSISTED OPTICAL THIN-FILM DEPOSITION [J].
MARTIN, PJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2158-2159
[4]   ION-BASED METHODS FOR OPTICAL THIN-FILM DEPOSITION [J].
MARTIN, PJ .
JOURNAL OF MATERIALS SCIENCE, 1986, 21 (01) :1-25
[5]  
NAGUSKO TA, 1987, OPTOELECTRON LASER T, V11, P120
[6]   NEW EQUIPMENT FOR PREPARATION OF FILMS BY ASSISTED DEPOSITION [J].
PAN, XZ ;
FAN, XJ ;
FENG, P ;
ZHANG, MZ ;
ZHU, ZL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :858-861
[7]  
PAN XZ, 1991, NUCL INSTRUM METH B, V59, P233, DOI 10.1016/0168-583X(91)95212-V
[8]   OPTICAL AND ELECTRICAL-PROPERTIES OF THIN SILVER FILMS GROWN UNDER ION-BOMBARDMENT [J].
PARMIGIANI, F ;
KAY, E ;
HUANG, TC ;
PERRIN, J ;
JURICH, M ;
SWALEN, JD .
PHYSICAL REVIEW B, 1986, 33 (02) :879-888
[9]  
YAGODKIN YD, 1989, NEWS SCI TECHNIQUES, V5
1