MECHANICAL-PROPERTIES OF DIAMONDLIKE CARBON-FILMS

被引：24

作者：

HOSHINO, S

FUJII, K

SHOHATA, N

YAMAGUCHI, H

TSUKAMOTO, Y

YANAGISAWA, M

机构：

[1] NEC CORP,FUNDAMENTAL RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

[2] NEC CORP,MICROELECTR RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 23,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 05期

关键词：

D O I：

10.1063/1.342877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1918 / 1922

页数：5

共 30 条

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