GROWTH OF PLATINUM SILICIDE UNDER PROTECTIVE LAYERS

被引：18

作者：

JOUBERT, P ^{[1
]}

AUVRAY, P ^{[1
]}

GUIVARCH, A ^{[1
]}

PELOUS, G ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,PMT CPM,F-22301 LANNION,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 11期

关键词：

D O I：

10.1063/1.89527

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：753 / 755

页数：3

共 18 条

[1] ANALYTICAL STUDY OF PLATINUM SILICIDE FORMATION [J].

BINDELL, JB ;

COLBY, JW ;

WONSIDLER, DR ;

POATE, JM ;

CONLEY, DK ;

TISONE, TC .

THIN SOLID FILMS, 1976, 37 (03) :441-452

[2] SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH PALLADIUM SILICIDE LAYERS [J].

CANALI, C ;

CAMPISANO, SU ;

LAU, SS ;

LIAU, ZL ;

MAYER, JW .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) :2831-2836

[3] PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE [J].

DANYLUK, S ;

MCGUIRE, GE .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (12) :5141-5144

[4] INTERDIFFUSION AND COMPOUND FORMATION IN THIN FILMS OF PD OR PT ON SI SINGLE CRYSTALS [J].

DROBEK, J ;

SUN, RC ;

TISONE, TC .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1971, 8 (01) :243-+

[5]

GOHLE R, 1964, Z METALLKD, V55, P503

[6] LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM [J].

HIRAKI, A ;

NICOLET, MA ;

MAYER, JW .

APPLIED PHYSICS LETTERS, 1971, 18 (05) :178-&

[7]

JOUBERT P, UNPUBLISHED

[8] EFFECT OF OXIDIZING AMBIENTS ON PLATINUM SILICIDE FORMATION .1. ELECTRON-MICROPROBE ANALYSIS [J].

KINGZETT, TJ ;

LADAS, CA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1729-1732

[9] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J].

LAU, SS ;

CHU, WK ;

MAYER, JW ;

TU, KN .

THIN SOLID FILMS, 1974, 23 (02) :205-213

[10] ENERGY-LEVELS AND CONCENTRATIONS FOR PLATINUM IN SILICON [J].

LISIAK, KP ;

MILNES, AG .

SOLID-STATE ELECTRONICS, 1975, 18 (06) :533-540

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