PRESSURE CONSIDERATIONS ASSOCIATED WITH ION SAMPLING FROM GLOW DISCHARGES

被引：46

作者：

COBURN, JW

KAY, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.1315386

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：738 / &

共 11 条

[1] ION SAMPLING CONSIDERATIONS FOR A DISCHARGE PLASMA OF NITROGEN [J].

BOHME, DK ;

GOODINGS, JM .

JOURNAL OF APPLIED PHYSICS, 1966, 37 (11) :4261-&

[2]

BROWN SC, 1959, BASIC DATA PLASMA PH, P33

[3] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J].

COBURN, JW ;

KAY, E .

APPLIED PHYSICS LETTERS, 1971, 18 (10) :435-&

[4] A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM [J].

COBURN, JW .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (08) :1219-&

[5]

DRAWIN HW, 1966, PLASMA DIAGNOSTICS, P777

[6] MASS SPECTROMETRIC STUDIES OF MOLECULAR IONS IN THE NOBLE GASES [J].

HORNBECK, JA ;

MOLNAR, JP .

PHYSICAL REVIEW, 1951, 84 (04) :621-625

[7] ELECTRON REMOVAL IN HELIUM AFTERGLOWS [J].

JOHNSON, RA ;

MCCLURE, BT ;

HOLT, RB .

PHYSICAL REVIEW, 1950, 80 (03) :376-379

[8]

KENNARD EH, 1938, KINETIC THEORY GASES, P64

[9] MASSENSPEKTROMETRISCHE UNTERSUCHUNGEN AN DER POSITIVEN SAULE IN AR, AR-HE- UND AR-H2-GEMISCHEN [J].

PAHL, M .

ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1963, A 18 (12) :1276-+

[10] ANGULAR DISTRIBUTION OF FLOW FROM ORIFICES AND TUBES AT HIGH KNUDSEN NUMBERS [J].

STICKNEY, RE ;

KEATING, RF ;

YAMAMOTO, S ;

HASTINGS, WJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (01) :10-&

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