POLYMETHYL METHACRYLATE AS AN ELECTRON SENSITIVE RESIST

被引：34

作者：

HARRIS, RA ^{[1
]}

机构：

[1] UNIV MANCHESTER,ELECT ENGN LABS,MANCHESTER 13,LANCASHIRE,ENGLAND

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 02期

关键词：

D O I：

10.1149/1.2403434

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：270 / 274

页数：5

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