A TUNABLE, ULTRAHIGH-SPECTRAL-BRIGHTNESS ARF EXCIMER LASER SOURCE

被引：29

作者：

EGGER, H

SRINIVASAN, T

HOHLA, K

SCHEINGRABER, H

VIDAL, CR

PUMMER, H

RHODES, CK

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 01期

关键词：

D O I：

10.1063/1.92555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：37 / 39

页数：3

共 7 条

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RHODES, CK .

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[4] A TUNABLE, ULTRAHIGH SPECTRAL BRIGHTNESS KRFSTAR EXCIMER LASER SOURCE [J].

HAWKINS, RT ;

EGGER, H ;

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RHODES, CK .

APPLIED PHYSICS LETTERS, 1980, 36 (06) :391-392

[5] DIGITAL WAVEMETER FOR CW LASERS [J].

KOWALSKI, FV ;

HAWKINS, RT ;

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[6]

RHODES CK, 1979, EXCIMER LASERS, P180

[7] COHERENT VUV SOURCES FOR HIGH-RESOLUTION SPECTROSCOPY [J].

VIDAL, CR .

APPLIED OPTICS, 1980, 19 (23) :3897-3903

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