Magnetic microactuation of polysilicon flexure structures

被引：117
作者：
Judy, JW
Muller, RS
Zappe, HH
机构：
[1] Berkeley Sensor & Actuator Center (BSAC), University of California, Berkeley, CA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1995年 / 4卷 / 04期
关键词：
D O I：
10.1109/84.475542
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described, Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment, A microactuator consisting of a 400 x (47 - 40) x 7 mu m(3) rectangular plate of NiFe attached to a 400 x (0.9 - 1.4) x 2.25 mu m(3) polysilicon cantilever beam has been displaced over 1.2 mm, rotated over 180 degrees, and actuated with over 0.185 nNm of torque, The microactuator is capable of motion both in and out of the wafer plane and has been operated in a conductive fluid environment. Theoretical expressions for the displacement and torque are developed and compared to experimental results. [144]
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页码：162 / 169
页数：8
相关论文
共 21 条
  • [1] AHN CH, 1992, JUN IEEE SOL STAT SE, P14
  • [2] AHN CH, 1993, FEB P IEEE MEMS, P1
  • [3] Bozorth R.M, 1951, FERROMAGNETISM
  • [4] BRENNEN R, 1990, FEB P IEEE MICR EL M, P9
  • [5] CULLITY BD, 1972, INTRO MAGNETIC MAT, P527
  • [6] FEDDER GK, 1992, JUN IEEE SOL STAT SE, P63
  • [7] Guckel H., 1991, Journal of Micromechanics and Microengineering, V1, P135, DOI 10.1088/0960-1317/1/3/001
  • [8] Guckel H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P7, DOI 10.1109/MEMSYS.1993.296942
  • [9] GUCKEL H, 1994, JUN SOL STAT SENS AC, P49
  • [10] JUDY JW, 1994, E COMMUNICATION 0613
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