OPTICAL REFLECTIVITY MEASUREMENTS USING A LASER PLASMA LIGHT-SOURCE

被引:84
作者
BORTZ, ML [1 ]
FRENCH, RH [1 ]
机构
[1] DUPONT CO,DEPT CENT RES & DEV,WILMINGTON,DE 19880
关键词
D O I
10.1063/1.102335
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1955 / 1957
页数:3
相关论文
共 17 条
[1]   OPTICAL PROPERTIES OF ALUMINUM OXICE IN VACUUM ULTRAVIOLET [J].
ARAKAWA, ET ;
WILLIAMS, MW .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1968, 29 (05) :735-&
[2]   QUANTITATIVE, FFT-BASED, KRAMERS-KRONIG ANALYSIS FOR REFLECTANCE DATA [J].
BORTZ, ML ;
FRENCH, RH .
APPLIED SPECTROSCOPY, 1989, 43 (08) :1498-1501
[3]  
BORTZ ML, IN PRESS PHYS SCR, V41
[4]   INVESTIGATION OF A LASER-PRODUCED PLASMA VUV LIGHT-SOURCE [J].
BRIDGES, JM ;
CROMER, CL ;
MCILRATH, TJ .
APPLIED OPTICS, 1986, 25 (13) :2208-2214
[5]   LASER-PRODUCED CONTINUA FOR ABSORPTION-SPECTROSCOPY IN THE VUV AND XUV [J].
CARROLL, PK ;
KENNEDY, ET ;
OSULLIVAN, G .
APPLIED OPTICS, 1980, 19 (09) :1454-1462
[6]   ABSOLUTELY MEASURED X-RAY-SPECTRA FROM LASER PLASMAS WITH TARGETS OF DIFFERENT ELEMENTS [J].
EIDMANN, K ;
KISHIMOTO, T .
APPLIED PHYSICS LETTERS, 1986, 49 (07) :377-378
[7]  
FRENCH RH, IN PRESS PHYS SCR, V41
[8]   DEBRIS AND VUV EMISSION FROM A LASER-PRODUCED PLASMA OPERATED AT 150 HZ USING A KRYPTON FLUORIDE LASER [J].
GINTER, ML ;
MCILRATH, TJ .
APPLIED OPTICS, 1988, 27 (05) :885-889
[9]   SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS [J].
GOHIL, P ;
KAPOOR, H ;
MA, D ;
PEKERAR, MC ;
MCILRATH, TJ ;
GINTER, ML .
APPLIED OPTICS, 1985, 24 (13) :2024-2027
[10]   TIME-RESOLVED MEASUREMENTS OF SHORT-WAVELENGTH FLUORESCENCE FROM X-RAY-EXCITED IONS [J].
KAPTEYN, HC ;
MURNANE, MM ;
FALCONE, RW .
OPTICS LETTERS, 1987, 12 (09) :663-665