AUGER-ELECTRON SPECTROSCOPY OF DEPOSITED SILANE LAYERS

被引:24
作者
CAIN, JF
SACHER, E
机构
[1] IBM CORP,MAT & ENGN ANAL,POB 6,ENDICOTT,NY 13760
[2] IBM CORP,FAILURE ANAL & ENVIRONM TEST,ENDICOTT,NY 13760
关键词
D O I
10.1016/0021-9797(78)90244-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:538 / 540
页数:3
相关论文
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