SOLIDIFICATION MECHANISMS OF LASER-ANNEALED THIN COPPER-FILMS - DUAL PHASE FORMATION

被引:2
作者
BLOCH, J
ZEIRI, Y
VENKERT, A
机构
关键词
D O I
10.1063/1.99259
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:874 / 876
页数:3
相关论文
共 12 条
  • [1] LASER-INDUCED MORPHOLOGY CHANGES IN THIN COPPER-FILMS
    BLOCH, J
    ZEIRI, Y
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) : 2637 - 2644
  • [2] LASER ANNEALING OF COPPER AND SILICON THIN-FILMS
    BLOCH, J
    ZEIRI, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1831 - 1835
  • [3] BONCHBRUEVICH AM, 1986, SOV PHYS TECH PHYS, V13, P640
  • [4] Born M., 1984, PRINCIPLES OPTICS
  • [5] MULTIPLE PHASE-TRANSITIONS IN GETE FILMS - DYNAMICS AND FILM STRUCTURE
    BOSTANJOGLO, O
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 76 (02): : 525 - 531
  • [6] CARSHOW HS, 1959, CONDUCTION HEAT SOLI
  • [7] Shingu P. H., 1985, Rapidly Quenched Metals. Proceedings of the Fifth International Conference, P35
  • [8] Touloukian Y.S., 1973, THERMOPHYSICAL PROPE, V10, P1
  • [9] TOULOUKIAN YS, 1973, THERMOPHYSICAL PROPE, V1
  • [10] AMORPHOUS-CRYSTALLINE BOUNDARY DYNAMICS IN CW LASER CRYSTALLIZATION
    ZEIGER, HJ
    FAN, JCC
    PALM, BJ
    CHAPMAN, RL
    GALE, RP
    [J]. PHYSICAL REVIEW B, 1982, 25 (06): : 4002 - 4018