ION-SENSITIVE FIELD-EFFECT TRANSISTORS WITH INORGANIC GATE OXIDE FOR PH SENSING

被引:80
作者
AKIYAMA, T
UJIHIRA, Y
OKABE, Y
SUGANO, T
NIKI, E
机构
[1] UNIV TOKYO,FAC ENGN,DEPT IND CHEM,BUNKYO KU,TOKYO 113,JAPAN
[2] UNIV TOKYO,DEPT ELECT & ELECTR ENGN,BUNKYO KU,TOKYO 113,JAPAN
[3] INST VOCAT TRAINING,SAGAMIHARA,JAPAN
关键词
D O I
10.1109/T-ED.1982.21054
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1936 / 1941
页数:6
相关论文
共 22 条
[1]   ISFETS USING INORGANIC GATE THIN-FILMS [J].
ABE, H ;
ESASHI, M ;
MATSUO, T .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1939-1944
[2]  
BACK RP, 1977, ANAL CHEM, V49, P2315
[5]   PHYSICAL MECHANISMS FOR CHEMICALLY SENSITIVE SEMICONDUCTOR-DEVICES [J].
BERGVELD, P ;
DEROOIJ, NF ;
ZEMEL, JN .
NATURE, 1978, 273 (5662) :438-443
[6]   EXTRACELLULAR POTENTIAL RECORDINGS BY MEANS OF A FIELD-EFFECT TRANSISTOR WITHOUT GATE METAL, CALLED OSFET [J].
BERGVELD, P ;
WIERSMA, J ;
MEERTENS, H .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1976, 23 (02) :136-144
[7]  
BUCK RP, 1977, ANAL CHEM, V43, P2315
[8]  
HO VQ, 1980, IEEE T ELECTRON DEV, V27, P1436, DOI 10.1109/T-ED.1980.20053
[9]  
JANATA J, 1976, IEEE T BIOMED ENG, V23, P241
[10]   SI3N4-SI ION-SENSITIVE SEMICONDUCTOR ELECTRODE [J].
LAUKS, IR ;
ZEMEL, JN .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1959-1964