TRANSIENT CURRENTS IN THIN RF SPUTTERED AL2O3 FILMS

被引:7
作者
NATHOO, V [1 ]
MASON, PR [1 ]
机构
[1] IMPERIAL COLL,DEPT ELECT ENGN,LONDON SW7 2BT,ENGLAND
来源
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS | 1977年 / 10卷 / 21期
关键词
D O I
10.1088/0022-3719/10/21/020
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:4335 / 4345
页数:11
相关论文
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