USE OF SECONDARY ION MASS-SPECTROMETRY FOR STUDIES OF OXYGEN-ADSORPTION AND OXIDATION

被引：50
作者：
WITTMAACK, K [1 ]
机构：
[1] GESELL STRAHLEN & UMWELTFORSCH MBH,PHYS TECH ABT,D-8042 NEUHERBERG,FED REP GER
来源：
SURFACE SCIENCE | 1977年 / 68卷 / 01期
关键词：
D O I：
10.1016/0039-6028(77)90196-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：118 / 129
页数：12
相关论文
共 42 条
[21]   SOME ASPECTS OF SURFACE BEHAVIOR OF SILICON [J].
JOYCE, BA .
SURFACE SCIENCE, 1973, 35 (01) :1-7
[22]  
Kelly R., 1973, Radiation Effects, V19, P39, DOI 10.1080/00337577308232213
[23]   SECONDARY ION EMISSION FROM SILICON AND SILICON-OXIDE [J].
MAUL, J ;
WITTMAACK, K .
SURFACE SCIENCE, 1975, 47 (01) :358-369
[24]   ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J].
MCHUGH, JA .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (04) :209-215
[25]   ABUNDANCE OF MOLECULAR-IONS IN SECONDARY ION MASS-SPECTROMETRY [J].
MORGAN, AE ;
WERNER, HW .
APPLIED PHYSICS, 1976, 11 (02) :193-195
[26]   INVESTIGATION OF SURFACE-REACTIONS BY STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .3. OXIDATION OF VANADIUM, NIOBIUM AND TANTALUM IN MONOLAYER RANGE [J].
MULLER, A ;
BENNINGHOVEN, A .
SURFACE SCIENCE, 1973, 39 (02) :427-436
[27]   INVESTIGATION OF SURFACE-REACTIONS BY STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .5. OXIDATION OF TITANIUM, NICKEL, AND COPPER IN MONOLAYER RANGE [J].
MULLER, A ;
BENNINGHOVEN, A .
SURFACE SCIENCE, 1974, 41 (02) :493-503
[28]  
Schulz F., 1973, Radiation Effects, V18, P211, DOI 10.1080/00337577308232124
[29]   THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].
SIGMUND, P .
PHYSICAL REVIEW, 1969, 184 (02) :383-+
[30]   SURFACE OXIDATION STUDIES OF IRON USING STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY (SIMS) [J].
STUMPE, E ;
BENNINGHOVEN, A .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 21 (02) :479-486
12345