LOW-TEMPERATURE CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY COPPER FROM AN ORGANOMETALLIC SOURCE

被引：81

作者：

BEACH, DB

LEGOUES, FK

HU, CK

机构：

[1] IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York 10598

来源：

CHEMISTRY OF MATERIALS | 1990年 / 2卷 / 03期

关键词：

D O I：

10.1021/cm00009a002

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：216 / 219

页数：4

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