ANNEALING AND ION-IMPLANTATION EFFECTS ON SEMIINSULATING GAAS OBTAINED FROM PHOTOINDUCED MICROWAVE REFLECTION

被引:0
作者
GUTMANN, RJ
CAMPBELL, C
BORREGO, JM
BLISS, D
机构
[1] RENSSELAER POLYTECH INST,DEPT ELECT COMP & SYST ENGN,TROY,NY 12181
[2] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12181
[3] ADV SEMICOND OPERAT,LOWELL,MA 01851
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D O I
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C452 / C452
页数:1
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