DETECTION OF MONOLAYER QUANTITIES OF OXYGEN ON SILICON USING ENERGY-DISPERSIVE X-RAY SPECTROMETRY

被引：9
作者：
MUSKET, RG
STRAUSSER, YE
机构：
[1] HEWLETT PACKARD CO,SOLID STATE LAB,PALO ALTO,CA 94304
[2] KEVEX CORP,FOSTER CITY,CA 94404
来源：
APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 05期
关键词：
D O I：
10.1063/1.91737
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：478 / 480
页数：3
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