PREPARATION OF SUPERCONDUCTING BI-CA-SR-CU-O THIN-FILMS BY RF MAGNETRON SPUTTERING

被引:0
作者
YANG, YF [1 ]
DIECKMANN, GH [1 ]
NORDMAN, JE [1 ]
机构
[1] UNIV WISCONSIN,DEPT ELECT & COMP ENGN,MADISON,WI 53706
关键词
D O I
10.1109/20.92809
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:2474 / 2476
页数:3
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