HIGH-SPEED CMOS-SOS ICS FABRICATED USING X-RAY-LITHOGRAPHY

被引:2
|
作者
STOVER, HL [1 ]
HAUSE, FL [1 ]
MCGREIVY, D [1 ]
机构
[1] HUGHES NEWPORT BEACH RES CTR,NEW BEACH,CA 90265
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D O I
10.1116/1.570260
中图分类号
O59 [应用物理学];
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页码:1635 / 1639
页数:5
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