共 50 条
- [21] X-RAY-LITHOGRAPHY UNIT GAINS SPEED BY PRINTING 6 WAFERS AT A TIME ELECTRONICS-US, 1980, 53 (05): : 73 - 74
- [23] Hybrid CMOS detectors for high-speed X-ray imaging REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (06):
- [26] A VERTICAL X-Y STAGE FOR X-RAY-LITHOGRAPHY USING SOR BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1988, 22 (02): : 102 - 108
- [27] THE IMPACT OF HIGH-SENSITIVITY RESIST MATERIALS ON X-RAY-LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2268 - 2273
- [29] X-RAY-LITHOGRAPHY STUDIES OF POLYSILANE USING A LASER PLASMA X-RAY SOURCE LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 615 - 620
- [30] X-RAY-LITHOGRAPHY USING CHLORINATED POLYMETHYLSTYRENE (CPMS) AS A NEGATIVE X-RAY RESIST JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (01): : 130 - 135