HIGH-SPEED CMOS-SOS ICS FABRICATED USING X-RAY-LITHOGRAPHY

被引：2
|
作者：
STOVER, HL [1 ]
HAUSE, FL [1 ]
MCGREIVY, D [1 ]
机构：
[1] HUGHES NEWPORT BEACH RES CTR,NEW BEACH,CA 90265
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期
关键词：
D O I：
10.1116/1.570260
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1635 / 1639
页数：5
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