LARGE AREA SUBSTRATE HEATER FOR ULTRA HIGH-VACUUM

被引：4
|
作者：
UNVALA, BA [1 ]
CENSLIVE, M [1 ]
机构：
[1] IMPERIAL COLL,DEPT MET & MAT SCI,LONDON SW7 2BP,ENGLAND
来源：
VACUUM | 1973年 / 23卷 / 09期
关键词：
D O I：
10.1016/0042-207X(73)92118-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：327 / 329
页数：3
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