AR-ION LASER-ASSISTED MOVPE OF ZNSE USING DMZN AND DMSE AS REACTANTS

被引：51
作者：
YOSHIKAWA, A
OKAMOTO, T
FUJIMOTO, T
ONOUE, K
YAMAGA, S
KASAI, H
机构：
[1] Department of Electrical and Electronics Engineering, Chiba University, Yayoi-cho, Chiba-shi
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 02期
关键词：
Arion laser; II-VI compounds; Laser CVD; Photoassisted MOVPE; Photocatalysis; ZnSe;
D O I：
10.1143/JJAP.29.L225
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Growth of ZnSe layers by Ar ion laser-assisted MOVPE using DMZn and DMSe has been investigated. It is shown that an Ar ion laser can be a useful light source for the photoassisted MOVPE of ZnSe. By utilizing several Ar ion laser emission lines near the absorption edge of ZnSe as the irradiation light, it has been reconfirmed that the absorption of photons by the ZnSe layer is essential for the growth rate enhancement in the photoassisted MOVPE of ZnSe. Furthermore, it has been found for the first time that hydrogen gas plays a very important role in the reaction between DMZn and DMSe to form ZnSe under photoirradiation. © 1990 IOP Publishing Ltd.
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页码：L225 / L228
页数：4
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