PHYSICAL-PROPERTIES OF SPRAYED SNO2 FILMS

被引：28
作者：
VASU, V
SUBRAHMANYAM, A
机构：
[1] Semiconductor Laboratory, Department of Physics, Indian Institute of Technology, Madras
来源：
THIN SOLID FILMS | 1991年 / 202卷 / 02期
关键词：
D O I：
10.1016/0040-6090(91)90099-J
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tin oxide (SnO2) thin films are prepared on soda-lime glass substrates by spray pyrolysis using anhydrous and pentahydrate (SnCl4.5H2O) tin chloride as starting material. X-ray diffraction data and the electrical and optical properties of these films as a function of substrate temperature (553-713 K) are reported. The growth rate of SnO2 films prepared from SnCl4.5H2O is observed to be higher and the resistivity is lower than for films prepared from anhydrous SnCl4.
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页码：283 / 288
页数：6
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