DIRECT MEASUREMENT OF IMPURITY DISTRIBUTION IN SEMICONDUCTING MATERIALS

被引：5
作者：
GUPTA, DC
CHAN, JY
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 02期
关键词：
D O I：
10.1063/1.1661149
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：515 / &
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