GETTERING OF METALLIC IMPURITIES FROM PLANAR SILICON DIODES

被引:52
作者
ING, SW
MORRISON, RE
ALT, LL
ALDRICH, RW
机构
关键词
D O I
10.1149/1.2425808
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:533 / 537
页数:5
相关论文
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