MODULATED MOLECULAR-BEAM EPITAXY - A SUCCESSFUL ROUTE TOWARD HIGH-QUALITY HIGHLY STRAINED HETEROSTRUCTURES

被引:14
作者
GERARD, JM
MARZIN, JY
JUSSERAND, B
机构
[1] Centre National d'Etudes des Télécommunications, F-92220 Bagneux
关键词
D O I
10.1016/0022-0248(91)90972-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
InAs/GaAs highly strained short period superlattices exhibit clearly improved structural and optical properties when grown by modulated MBE at low temperature (350-degrees-C) instead of conventional MBE. This technique forces a layer by layer growth of the strained layers. Current descriptions of the growth mechanism are discussed, and an alternative model is proposed for it.
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页码:205 / 209
页数:5
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