DEPTH PROFILING OF ELEMENTS IN SURFACE-LAYERS OF SOLIDS BASED ON ANGULAR RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：43

作者：

BASCHENKO, OA

NEFEDOV, VI

机构：

[1] N.S. Kurnakov Institute of General and Inorganic Chemistry, the Academy of Sciences, the U.S.S.R., Moscow

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1990年 / 53卷 / 1-2期

关键词：

D O I：

10.1016/0368-2048(90)80337-A

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

A numerical method is proposed for the non-destructive restoration of the depth-concentration profiles for four components, based on the angular distribution of XPS intensities. Calculations performed for a number of model systems demonstrated that ratios of concentrations obtained by using simplified procedures, i.e. from relative XPS intensities for a single escaping angle, led to large errors (up to 200%) for the upper surface layer. A number of restored profiles are presented using experimental angle-resolved XPS data for samples containing 3-4 components. © 1990.

引用

页码：1 / 18

页数：18

共 16 条

[1]

Band I. M., 1979, Atomic Data and Nuclear Data Tables, V23, P443, DOI 10.1016/0092-640X(79)90027-5

[2]

Baschenko O. A., 1982, Metallofizika, V4, P61

[3] RELATIVE INTENSITIES IN X-RAY PHOTOELECTRON-SPECTRA .7. THE EFFECT OF ELASTIC-SCATTERING IN A SOLID ON THE ANGULAR-DISTRIBUTION OF PHOTOELECTRONS ESCAPING FROM SAMPLES COVERED WITH THIN-FILMS OF VARIOUS THICKNESSES [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 21 (02) :153-169

[4] RELATIVE INTENSITIES IN X-RAY PHOTOELECTRON-SPECTRA .4. EFFECT OF ELASTIC-SCATTERING IN A SOLID ON THE FREE-PATH OF ELECTRONS AND THEIR ANGULAR-DISTRIBUTION [J].

BASCHENKO, OA ;

NEFEDOV, VI .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1979, 17 (06) :405-420

[5]

BASCHENKO OA, 1982, POVERHN, V2, P87

[6]

BASCHENKO OA, 1987, POVERKHN, V7, P75

[7]

BASCHENKO OA, 1987, POVERKHN, V10, P99

[8]

BASCHENKO OA, 1984, J ELECT SPECTROSC RE, V34, P304

[9] DECONVOLUTION OF CONCENTRATION DEPTH PROFILES FROM ANGLE RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY DATA [J].

BUSSING, TD ;

HOLLOWAY, PH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :1973-1981

[10] X-RAY PHOTO-ELECTRON ANALYSIS OF SURFACE-LAYERS WITH COMPOSITION GRADIENTS [J].

NEFEDOV, VI .

SURFACE AND INTERFACE ANALYSIS, 1981, 3 (02) :72-75

← 1 2 →