STRAIN IMAGING ANALYSIS OF SI USING RAMAN MICROSCOPY

被引：32
|
作者：
AJITO, K
SUKAMTO, JPH
NAGAHARA, LA
HASHIMOTO, K
FUJISHIMA, A
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词：
D O I：
10.1116/1.579867
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1234 / 1238
页数：5
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