WHOLE-FIELD METHOD FOR MEASUREMENT OF 2-DIMENSIONAL STATE OF STRESS IN THIN-FILMS

被引：5

作者：

CHIANG, F

机构：

来源：

关键词：

D O I：

10.1007/BF02321696

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：377 / &

共 11 条

BRENNER, A ;

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HOFFMAN RW, 1966, MECHANICAL PROPERTIE, P261

[6] AN APPARATUS FOR MEASURING STRESS IN THIN FILMS [J].

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[7]

Ligtenberg F K, 1954, P SESA, V12, P83

[8]

RANGANAYAKAMMA B, 1970, 179 STAT U NY STON B

[9]

REIDER G, 1965, FORSCH ING WES, V21

[10] The tension of metallic films deposited by electrolysis [J].

Stoney, GG .