EXPERIMENTAL-STUDY OF REACTIVE CATHODE SPUTTERING OF COBOLT

被引：10

作者：

HECQ, M ^{[1
]}

HECQET, A ^{[1
]}

VANCAKENBERGHE, J ^{[1
]}

机构：

[1] UNIV MONS, MONS, BELGIUM

来源：

THIN SOLID FILMS | 1977年 / 42卷 / 01期

关键词：

D O I：

10.1016/0040-6090(77)90082-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：97 / 105

页数：9

共 10 条

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[3]

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TAGLAUER, E ;

KAY, E .

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[5] REACTIVE SPUTTERING OF METALS IN OXIDIZING ATMOSPHERES [J].

HELLER, J .

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[6]

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[7]

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[8]

SAINTMARTIN, 1969, THESIS STRASBOURG

[9]

SAMIRANT M, 1970, THESIS STRASBOURG

[10] MECHANISM OF RF REACTIVE SPUTTERING [J].

SHINOKI, F ;

ITOH, A .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (08) :3381-3384

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