CALCULATION OF THE GROWTH VELOCITY FOR LIQUID ENCAPSULATED CZOCHRALSKI-GROWN GAAS CRYSTALS

被引:0
作者
KLIMOVITSKY, IK [1 ]
机构
[1] GTE LABS INC,WALTHAM,MA 02254
关键词
D O I
10.1016/0022-0248(93)90091-A
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The growth velocity of GaAs single crystals grown with the high pressure liquid encapsulated Czochralski (HP-LEC) technique was calculated and plotted for the first time in almost a century's history of the crystal growth. The experimental data confirmed that during the run, this velocity varied from the pulling rate by 50%.
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页码:614 / 616
页数:3
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