MORPHOLOGY AND TEXTURE OF COEVAPORATED CO-CR FILMS

被引：3

作者：

VANKRANENBURG, H ^{[1
]}

LODDER, C ^{[1
]}

POPMA, TJA ^{[1
]}

机构：

[1] UNIV TWENTE,MESA RES INST,POB 217,7500 AE ENSCHEDE,NETHERLANDS

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 120卷 / 1-3期

关键词：

D O I：

10.1016/0304-8853(93)91360-J

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure of co-evaporated Co-Cr films is investigated. The columnar morphology is tilted towards the main source. Due to the geometry effect of opposing vapour directions, compositional separation occurs. With AES direct proof of this was established. Consequently it is unnecessary to increase the substrate temperature to obtain enhanced energy products.

引用

页码：353 / 356

页数：4

共 6 条

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