OXIDE STOICHIOMETRY IN THE EARLY STAGES OF TITANIUM OXIDATION

被引:29
作者
VAQUILA, I [1 ]
PASSEGGI, MCG [1 ]
FERRON, J [1 ]
机构
[1] UNIV NACL LITORAL,INTEC,FIS MAT GRP,RA-3000 SANTA FE,ARGENTINA
关键词
D O I
10.1016/0039-6028(93)90381-S
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Auger electron spectroscopy and principal component analysis have been used to study the first stages of titanium oxidation at low pressures. We found that titanium oxidizes from nearly the beginning of the process with an almost negligible stage of oxygen adsorption. The oxidation process is characterized by the presence of only one phase (titanium dioxide). We also found that the use of the ratio between Ti(LMV) and T(LMM) Auger transitions, to follow the titanium oxidation process, as it has been previously suggested, may lead to erroneous interpretations.
引用
收藏
页码:L795 / L800
页数:6
相关论文
共 27 条
[1]   PRINCIPAL COMPONENT ANALYSIS AS A METHOD FOR SILICIDE INVESTIGATION WITH AUGER-ELECTRON SPECTROSCOPY [J].
ATZRODT, V ;
LANGE, H .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 79 (02) :489-496
[2]   INVESTIGATION OF NISI AND PD3SI THIN-FILMS BY AES AND XPS [J].
ATZRODT, V ;
WIRTH, T ;
LANGE, H .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 62 (02) :531-537
[3]  
ATZRODT V, 1983, PHYS STATUS SOLIDI A, V79, P373
[4]   CHARACTERIZATION OF TIO2 FILMS MODIFIED BY PLATINUM DOPING [J].
AVALLE, L ;
SANTOS, E ;
LEIVA, E ;
MACAGNO, VA .
THIN SOLID FILMS, 1992, 219 (1-2) :7-17
[5]   CHANGES IN THE SURFACE-COMPOSITION OF SI, TIO2, AND SIO2 INDUCED BY PULSED RUBY-LASER IRRADIATION [J].
BERMUDEZ, VM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01) :51-57
[6]   ELECTRON-EMISSION AND ION DESORPTION SPECTROSCOPY OF CLEAN AND OXIDIZED TI(0001) [J].
BERTEL, E ;
STOCKBAUER, R ;
MADEY, TE .
SURFACE SCIENCE, 1984, 141 (2-3) :355-387
[7]  
BIGNOLAS JB, 1981, SURF SCI, V108, pL453, DOI 10.1016/0039-6028(81)90442-8
[8]   A PHOTOELECTRON AND ENERGY-LOSS SPECTROSCOPY STUDY OF TI AND ITS INTERACTION WITH H-2, O-2, N-2 AND NH3 [J].
BIWER, BM ;
BERNASEK, SL .
SURFACE SCIENCE, 1986, 167 (01) :207-230
[9]  
BURRELL MC, 1985, SURF SCI, V160, P253
[10]  
FERRON J, 1991, P SLAFS6, P135