EFFECTS OF HYDROGEN ANNEALING AFTER CHANNEL HOT-CARRIER STRESS

被引：1
|
作者：
SAKS, NS
KLEIN, RB
机构：
[1] SFA, Inc., Landover
来源：
MICROELECTRONIC ENGINEERING | 1993年 / 22卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(93)90170-A
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
[No abstract available]
引用
收藏
页码：265 / 268
页数：4
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