SELECTIVE EPITAXIAL-GROWTH OF SILICON BY USING SILICON-NITRIDE FILM AS A MASK

被引：17
|
作者：
OGAWA, H
NISHINAGA, T
ARIZUMI, T
KASUGA, M
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 12期
关键词：
D O I：
10.1143/JJAP.10.1675
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1675 / +
页数：1
相关论文
共 50 条
  • [1] THE SELECTIVE EPITAXIAL-GROWTH OF SILICON
    GOULDING, MR
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 17 (1-3): : 47 - 67
  • [2] THE SELECTIVE EPITAXIAL-GROWTH OF SILICON
    GOULDING, MR
    JOURNAL DE PHYSIQUE IV, 1991, 1 (C2): : 745 - 778
  • [3] SELECTIVE EPITAXIAL-GROWTH OF SILICON
    OSENBACH, JW
    SCHIMMEL, DG
    FEYGENSON, A
    BASTEK, JJ
    TSAI, JCC
    PRAEFCKE, HC
    BONATO, EW
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (11) : 2318 - 2323
  • [4] SELECTIVE SILICON EPITAXIAL-GROWTH BY LPCVD USING SILANE
    PARKER, GJ
    STARBUCK, CMK
    ELECTRONICS LETTERS, 1990, 26 (13) : 831 - 832
  • [5] AN INTEGRATED SILICON COLOR SENSOR USING SELECTIVE EPITAXIAL-GROWTH
    BARTEK, M
    GENNISSEN, PTJ
    SARRO, P
    FRENCH, PJ
    WOLFFENBUTTEL, RF
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 41 (1-3) : 123 - 128
  • [6] CMOS DEVICE ISOLATION USING SILICON SELECTIVE EPITAXIAL-GROWTH
    TING, CH
    STIVERS, A
    BORLAND, JD
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C358 - C358
  • [7] SELECTIVE EPITAXIAL-GROWTH OF SILICON IN PANCAKE REACTORS
    KASTELIC, M
    OH, I
    TAKOUDIS, CG
    FRIEDRICH, JA
    NEUDECK, GW
    CHEMICAL ENGINEERING SCIENCE, 1988, 43 (08) : 2031 - 2036
  • [8] SELECTIVE EPITAXIAL-GROWTH OF SILICON IN A BARREL REACTOR
    TAKOUDIS, CG
    KASTELIC, MM
    CHEMICAL ENGINEERING SCIENCE, 1989, 44 (09) : 2049 - 2062
  • [9] FACET FORMATION IN SELECTIVE SILICON EPITAXIAL-GROWTH
    ISHITANI, A
    KITAJIMA, H
    ENDO, N
    KASAI, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (10): : 1267 - 1269
  • [10] THE STUDY OF SELECTIVITY IN SILICON SELECTIVE EPITAXIAL-GROWTH
    YE, L
    ARMSTRONG, BM
    GAMBLE, HS
    MICROELECTRONIC ENGINEERING, 1994, 25 (2-4) : 153 - 158
12345