ALIGNABLE LIFTOFF TRANSFER OF DEVICE ARRAYS VIA A SINGLE POLYMERIC CARRIER MEMBRANE

被引：7
作者：
CALLAHAN, JJ
MARTIN, KP
DRABIK, TJ
QUIMBY, BB
FAN, C
机构：
[1] GEORGIA INST TECHNOL,CTR MICROELECTR RES,ATLANTA,GA 30332
[2] UNIV CALIF SAN DIEGO,DEPT ELECT & COMP ENGN,LA JOLLA,CA 92093
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 11期
关键词：
SEMICONDUCTOR DEVICES AND MATERIALS;
D O I：
10.1049/el:19930634
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Letter reports epitaxial liftoff and direct bonding of GaAs/AlxGa1-xAs heterostructure device arrays and continuous films, using a single transparent polymer membrane to support the material during etch of the sacrificial layer and to manipulate it into position for bonding. Au-Sn eutectic alloy bonding leads to a metallurgical bond in minutes. Photoluminescence and current voltage characteristics show that material quality is not substantially degraded in the transfer process.
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收藏
页码：951 / 953
页数：3
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